JNP Co., Ltd

CMP Pad Sanding Automation

Content

Process summary: Pad feed tray → 6-axis robot pick-up → 1st side sanding → 2nd rotary polishing → finished-part discharge tray
Key configuration: 6-axis robot + side-sanding unit + rotary polishing chuck + transparent safety cover cell + HMI control panel
Benefits: fully unmanned CMP pad polishing process / automatic circulation between 1st & 2nd stages / real-time internal view through the transparent cover

Process Overview

✔ Pad feed tray → 6-axis robot pick-up → 1st side sanding → 2nd rotary polishing → finished-part discharge — the entire process is fully automated
✔ Inside the transparent safety cover cell, the 6-axis robot handles automatic transfer between the 1st and 2nd machining stations
✔ The transparent safety cover enables real-time visual monitoring of the internal process — status monitoring without stopping the line

Process Flow

Pad Loading

Tray loading

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Robot Pick-up

6-axis transfer

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1st Side Sanding

Edge sanding

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2nd Rotary Polishing

Precision surface polishing

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Part Discharge

Auto tray stacking

Key Components

6-Axis Industrial Robot A 6-axis articulated robot installed inside the transparent safety cover cell picks up CMP pads from the feed tray by vacuum suction and automatically transfers them to the 1st and 2nd machining stations. Blue pneumatic tubing is routed along the arm. Handling / Transfer	1st Stage — Side Sanding Unit A pneumatic-cylinder-pressurized abrasive belt / sanding unit presses against the side of the rotating CMP pad for uniform sanding. A 2-axis slide precisely controls the contact position and pressure, and chips and dust are generated during machining. Edge Sanding / 1st Stage
2nd Stage — Rotary Polishing Chuck The surface of the CMP pad fixed on the rotary chuck is precisely machined by a rotary polishing head. A motor-driven rotary chuck (black, circular, approx. Ø300 mm) clamps the pad while the polishing head uniformly processes the entire surface. Surface Polishing / 2nd Stage	Pad Feed & Discharge Trays Black anodized aluminum trays (12 slots) travel left and right on linear rails. The feed tray (left) and the finished-part discharge tray (right) operate independently and circulate automatically in sync with the robot. Feeding / Discharge
Transparent Safety Cover Cell A safety cover cell built from an aluminum-profile frame fitted with transparent acrylic / PC panels. The internal condition can be checked visually in real time from the outside during machining, with access through a sliding door. Safety / Enclosure	Integrated HMI Control Panel An arm-mounted touchscreen HMI monitors motor frequency, slide position, torque values, and process steps in real time. Emergency-stop (red), power, and run buttons plus a keyboard are integrated into the external operation panel. Control / Monitoring

Benefits & Applications

Benefits

✔ Fully unmanned across feeding, 1st/2nd machining, and discharge
✔ Automatic robot circulation between the 1st & 2nd stages — continuous operation
✔ Real-time view of the internal process through the transparent cover
✔ Uniform pad polishing quality — zero operator intervention
✔ Tray-based batch processing maximizes productivity

Applications

· Automatic post-processing of CMP polishing pad surfaces
· Regeneration / polishing of pads for semiconductor processes
· Automatic sanding of large circular disc-type parts
· Precision abrasive post-processing automation lines

PRODUCTS & SOLUTIONS

Precision Tool Machining JNP Co., Ltd